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Semiconductor Biosensing Technology, Medicine, Page 5

Semiconductor Biosensing Technology

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See entire paper: http://medical.wesrch.com/pdfME14GWGS4HYXR
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FET chip


sensing spot gate area
10mm
gate area

340mm


gate area




300mm
polymer cover
1mm
4 gate-FET
FET chip
Channel layout - Gate width
Si3N4/SiO2 gate insulator

1 mm ~ 10 mm
Source




Drain
- Gate length
1 mm ~ 2400 mm
L=5 mm W=2400 mm
16 gate FET chip

次世代チップ 2010/10/28

 
 
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